Elk Grove Village IL, December 7, 2007 --Sonoscan has introduced the AW200™ Series C-SAM® acoustic micro imaging system, which performs automated inspection, analysis and sorting of bonded wafers up to 200mm (8 in.) in diameter.
To avoid immersing the bonded wafer pair in water - a technique that can conceal defects - the AW200 images wafer pairs with Sonoscan’s proprietary Waterfall™ transducer. After imaging, the wafer pair is automatically dried.
The AW200 employs Sonoscan-designed very high frequency transducers capable of detecting inter-wafer voids as small as 5 microns in diameter and as thin as 0.02 micron (0.0000008 in.). The transducers scan the wafer at the same high speed as other C-SAM instruments thereby providing the highest scanning throughput in the industry. The two high-precision robotic arms that handle the wafer pairs permit even higher throughput.
Automated analysis of the acoustic data accurately determines the bonded/non-bonded areas, the number and sizes of voids, zero level package seal integrity, and the accept/reject status of the wafer pair according to the user’s criteria.
Sonoscan, Inc., 2149 E. Pratt Blvd., Elk Grove Village IL USA 60007
Phone: 847 437-6400 Fax: 847 437-1550
E-mail: info@sonoscan.com Website: www.sonoscan.com
Photo caption: Sonoscan’s AW200 automatically inspects bonded wafer pairs for voids and other defects.
About Sonoscan: Sonoscan is the leading developer and manufacturer of acoustic microscopy systems, widely used for non-destructive imaging and analysis of internal features. For over 30 years, Sonoscan’s attention to customer needs and investment in R&D has created systems that set industry standards for speed and accuracy. Key products include C-SAM® systems for off-line and laboratory analysis, and FACTS2™ for automated production inspection. Sonoscan application engineers, with a total of more than two centuries’ experience in acoustic microscopy, conduct frequent workshops and seminars. SonoLab, a division of Sonoscan, operates application testing laboratories in 7 global locations.
